気体材料の供給法及び装置、並びにそれを用いたガラス微粒子堆積体及びガラス材料の製造法

Title:

気体材料の供給法及び装置、並びにそれを用いたガラス微粒子堆積体及びガラス材料の製造法

Document Type and Number:

Japanese Patent JP4277574

Kind Code:

B2

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Inventors:

Nobuyuki Hirano

Application Number:

JP2003137404A

Publication Date:

June 10, 2009

Filing Date:

May 15, 2003

Export Citation:

Assignee:

Sumitomo Electric Industries, Ltd.

International Classes:

C03B8/04; B01J7/02

Domestic Patent References:

Attorney, Agent or Firm:

Minoru Nakano
Mikio Yamaguchi
Hideaki Nishima
Ryoichi Hagiwara
Takashi Watanabe
Yuko Ishikawa

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