Title:
液晶表示装置用アレイ基板の製造方法
Document Type and Number:
Japanese Patent JP4280727
Kind Code:
B2
Abstract:
Disclosed is an array substrate of an LCD, and a method for fabricating it, which simplifies the fabrication process, thereby reducing fabrication costs. The process is simplified because the array substrate does not have a passivation film. The thin film transistors on the array substrate each have an active layer that is protected from contamination by forming a channel insulation layer on the active layer through a dry-etching process. Further, the gate line, gate pad, and gate electrode may have a two-layer structure having a low-resistance metal layer and a barrier metal layer, or a three-layer structure having a low-resistance metal layer and two barrier metal layers.
Inventors:
Yeongseok Choi
Byung-yeon Ann
Hong Yu
Kisul Cho
Byung-yeon Ann
Hong Yu
Kisul Cho
Application Number:
JP2005154615A
Publication Date:
June 17, 2009
Filing Date:
May 26, 2005
Export Citation:
Assignee:
LG Display Company Limited
International Classes:
G09F9/00; G02F1/13; G02F1/1362; G02F1/1368; G09F9/30
Domestic Patent References:
| JP2002289857A | ||||
| JP2000111958A | ||||
| JP2215134A | ||||
| JP2004163933A | ||||
| JP2004212964A | ||||
| JP2001109014A | ||||
| JP2001311965A | ||||
| JP2002184999A | ||||
| JP2004199049A | ||||
| JP2002107762A |
Foreign References:
| WO2003056385A1 | ||||
| WO2003088193A1 |
Attorney, Agent or Firm:
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order