基板搬送装置 - Dainippon Screen Mfg. Co., Ltd.

Title:

基板搬送装置

Document Type and Number:

Japanese Patent JP4286035

Kind Code:

B2

Inventors:

Shigeru Ohara
Naohisa Okada
Naoyuki Osada
Shigeki Minami

Application Number:

JP2003075875A

Publication Date:

June 24, 2009

Filing Date:

March 19, 2003

Export Citation:

Assignee:

Dainippon Screen Mfg. Co., Ltd.

International Classes:

B65G13/04; B65G49/06; B65G13/12; B65G49/07; H01L21/677; H01L21/68

Domestic Patent References:

Attorney, Agent or Firm:

Yoshito Fukushima

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