Title:
多段洗浄方法及び装置
Document Type and Number:
Japanese Patent JP4290318
Kind Code:
B2
Inventors:
Shizuo Sasaki
Akinori Aoyama
Tomohiro Ishioka
Regular law
Akinori Aoyama
Tomohiro Ishioka
Regular law
Application Number:
JP2000173766A
Publication Date:
July 01, 2009
Filing Date:
June 09, 2000
Export Citation:
Assignee:
Hiyo Engineering Co., Ltd.
International Classes:
B08B3/08; B08B3/10
Domestic Patent References:
| JP62279877A | ||||
| JP1292892A | ||||
| JP5123658A | ||||
| JP6190347A |
Attorney, Agent or Firm:
Yoshito Kitano