Title:
走査形電子顕微鏡
Document Type and Number:
Japanese Patent JP4302316
Kind Code:
B2
Abstract:
The present invention relates to a scanning electron microscope employing a deceleration field forming technology (retarding), more particularly a scanning electron microscope which separates and detects secondary electrons at high efficiency.The object of the present invention is accomplished by providing an electron source, a lens for condensing the primary electron beam which is emitted from said electron source, a detector for detecting electrons which are generated by radiation of the primary electron beam onto a specimen, a first deceleration means for decelerating the primary electron beam which is radiated onto said specimen, a second deceleration means for decelerating electrons which are generated on the specimen, and a deflector for deflecting said electrons which are decelerated by said second decelerating means.
Inventors:
Hideo Tosho
Takami
Makoto Esumi
Yamada Osamu
Yoichi Ose
Tomohiro Kudo
Takami
Makoto Esumi
Yamada Osamu
Yoichi Ose
Tomohiro Kudo
Application Number:
JP2000536093A
Publication Date:
July 22, 2009
Filing Date:
March 01, 1999
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/28; G01Q30/02; H01J37/244
Domestic Patent References:
| JPS61220259A | 1986-09-30 | |||
| JPH09171791A | 1997-06-30 | |||
| JPH08138611A | 1996-05-31 | |||
| JPH0636730A | 1994-02-10 | |||
| JPH0955181A | 1997-02-25 | |||
| JPH11260306A | 1999-09-24 | |||
| JPH1167139A | 1999-03-09 | |||
| JPS61288357A | 1986-12-18 |
Foreign References:
| WO1999014785A1 | 1999-03-25 |
Attorney, Agent or Firm:
Yukihiko Takada
Masaru Takenouchi
Masaru Takenouchi