シリコン単結晶引上用種結晶およびこれを用いたシリコン単結晶の製造方法

Title:

シリコン単結晶引上用種結晶およびこれを用いたシリコン単結晶の製造方法

Document Type and Number:

Japanese Patent JP4336600

Kind Code:

B2

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Inventors:

Matsumura Nao
Abe Naoshi

Application Number:

JP2004089889A

Publication Date:

September 30, 2009

Filing Date:

March 25, 2004

Export Citation:

Assignee:

Covalent Materials Co., Ltd.

International Classes:

C30B29/06

Domestic Patent References:

JP11171694A
JP11302096A

Attorney, Agent or Firm:

Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto

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