Title:
紫外光洗浄装置および紫外光洗浄装置用紫外線ランプ
Document Type and Number:
Japanese Patent JP4337547
Kind Code:
B2
Abstract:
An ultraviolet ray cleaning device for cleaning a to-be-treated object being conveyed by irradiation of ultraviolet rays on the object from an ultraviolet ray lamp (32). The ultraviolet ray cleaning device is characterized by having a gas supply route constructed such that a gas is blown on an ultraviolet ray irradiation surface of the object after passing through a gas diffusion plate (35).
Inventors:
Koji Hosoya
Hiromi Sakamoto
Hiromi Sakamoto
Application Number:
JP2003435401A
Publication Date:
September 30, 2009
Filing Date:
December 26, 2003
Export Citation:
Assignee:
GS Yuasa Corporation
International Classes:
H01L21/304; B08B5/02; B08B7/00; C03C23/00
Domestic Patent References:
| JP2001300451A | ||||
| JP2001137800A | ||||
| JP2000260396A | ||||
| JP2002184742A |
Foreign References:
| WO2002036259A1 |
Attorney, Agent or Firm:
Arisa Ushiro