Title:
ローバーの研磨装置及び研磨方法
Document Type and Number:
Japanese Patent JP4346392
Kind Code:
B2
Abstract:
An apparatus and a method for polishing a row bar including magnetic head sliders. A lapping surface plate is rotatable, and a housing is movable above the lapping surface plate. A jig is secured to the housing for holding the row bar. The jig is formed by an elongated rigid member having a plurality of holes and an elongated elastic member fixed to the rigid member. An air cylinder presses the whole row bar, and a pressing devices individually presses portions of the elastic member corresponding to magnetic head sliders of the row bar through the holes of the rigid member. A portion of the elastic member is deformed to press a portion of the row bar in response to a change in the measured resistance of ELG resistance elements in the row bar.
Inventors:
Koji Sudo
Yoshiaki Yanagita
Yoshiaki Yanagita
Application Number:
JP2003326656A
Publication Date:
October 21, 2009
Filing Date:
September 18, 2003
Export Citation:
Assignee:
富士通株式会社
International Classes:
B24B37/005; B24B37/04; B24B37/30; B24B49/16
Domestic Patent References:
| JP2002157723A | ||||
| JP4053672A | ||||
| JP2003220549A | ||||
| JP2001030157A | ||||
| JP2002137159A | ||||
| JP11000863A | ||||
| JP2000296456A | ||||
| JP2000301448A | ||||
| JP2003231049A |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Masaya Nishiyama
Jun Tsuruta
Masaya Nishiyama