Title:
ナノサイズα-アルミナ粉末及びそれを含むスラリーの製造方法
Document Type and Number:
Japanese Patent JP4347884
Kind Code:
B2
Abstract:
The present invention provides nanoporous α-alumina powders comprising powder comprising interconnected α-alumina primary particles having an average particle size of less than about 100 nm and an interpenetrated array of pores or voids. The invention also provides nanosized α-alumina powders comprising α-alumina particles having an average particle size of less than about 100 nm and slurries, particularly aqueous slurries, which comprise nanosized α-alumina powders of the invention. The invention further provides methods of manufacturing nanoporous α-alumina powders and nanosized α-alumina powders of the invention and methods of polishing using slurries of the invention.
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Inventors:
Wan, Yuf
Application Number:
JP2006509649A
Publication Date:
October 21, 2009
Filing Date:
March 31, 2004
Export Citation:
Assignee:
SAINT-GOBAIN CERAMICS AND PLASTICS, INC.
International Classes:
C01F7/02; B24B37/00; C01F7/023; C09K3/14; H01L21/304
Domestic Patent References:
| JP64033013A | ||||
| JP62128918A | ||||
| JP64003008A | ||||
| JP4505000A | ||||
| JP5345611A | ||||
| JP6279095A | ||||
| JP11268911A | ||||
| JP11349323A | ||||
| JP2002038132A | ||||
| JP2004504256A |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Masaya Nishiyama
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Masaya Nishiyama