To provide a method for forming an overcoat layer of which the surface includes no foreign substance and has high smoothness in the case of forming the overcoat layer on a color filter.
The method for forming an overcoat includes: a process (1) for forming a coating film of film thickness (film thickness 3) obtained by adding the film thickness (film thickness 2) of a foreign substance removing layer to the film thickness (film thickness 1) of an overcoat layer on a substrate on which a color filter layer is formed by using positive photosensitive resin; a process (2) for performing exposure of whole surface through a photomask forming the overcoat layer; a process (3) for performing full face exposure corresponding to the film thickness (film thickness 2) of the foreign substance removing layer, and a process (4) for forming a pattern-like overcoat layer by removing the foreign substance removing layer and a non-pattern part of the overcoat layer by developing.
COPYRIGHT: (C)2005,JPO&NCIPI
Takao Taguchi
JP2001093816A | ||||
JP7281020A | ||||
JP11168052A |