Title:
真空チャック装置及び吸着圧力制御方法
Document Type and Number:
Japanese Patent JP4364106
Kind Code:
B2
Inventors:
Yoshio Baba
Application Number:
JP2004323464A
Publication Date:
November 11, 2009
Filing Date:
November 08, 2004
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
B25J15/06; B25J13/00; B25J19/06; H01L21/683
Domestic Patent References:
| JP2004158760A | ||||
| JP2002299418A |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tetsuro Shimada
Ryu Kobayashi
Masaya Nishiyama
Jun Tsuruta
Tetsuro Shimada
Ryu Kobayashi
Masaya Nishiyama