Title:
スパッターカソード
Document Type and Number:
Japanese Patent JP4367987
Kind Code:
B2
Abstract:
A sputtering cathode with a flat plate-shaped target (8) and a tub-shaped yoke (3) arranged behind the target (8), with center ridge (5) and with magnets (7,7') for generating an enclosed tunnel of arc-shaped curved field lines (15,15') in front of the target surface, as well as with three sheet metal cutouts (9,10,11) or groups of partial cutouts inserted into the plane between the target (8) and the end faces (12) of the tub rim of the yoke (3) facing the target (8), all the sheet metal cutouts (9,10,11) together form two gaps (a,b) extending roughly parallel to the end faces (12,13), wherein the magnets (7,7') are each incorporated or inserted into the yoke bottom and the side surfaces of the magnets (7,7') facing towards and away from the target (8) run flush with the yoke bottom.
Inventors:
Rolf Adam
Jörg Kremper-Hesse
Martin Behr
Jörg Kremper-Hesse
Martin Behr
Application Number:
JP30856398A
Publication Date:
November 18, 2009
Filing Date:
October 29, 1998
Export Citation:
Assignee:
Oerlikon Deutschland Holding GmbH
International Classes:
H01J37/34; C23C14/34; C23C14/35
Domestic Patent References:
| JP60138070A | ||||
| JP9249970A | ||||
| JP1156471A |
Foreign References:
| DE19622606A1 | ||||
| WO1995012003A1 |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Toshiomi Yamazaki