ドライエッチング方法 - Hitachi High-Technologies Corporation

Title:

ドライエッチング方法

Document Type and Number:

Japanese Patent JP4368244

Kind Code:

B2

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Inventors:

Ishihara
Go Saito
Kenichi Kuwahara
Yasuhiro Nishimori
Kai Miomi

Application Number:

JP2004146207A

Publication Date:

November 18, 2009

Filing Date:

May 17, 2004

Export Citation:

Assignee:

Hitachi High-Technologies Corporation

International Classes:

H01L21/28; H01L21/3065; H01L29/423; H01L29/49; H01L29/78

Domestic Patent References:

JP3083335A
JP2001284283A

Foreign References:

US6518106

Attorney, Agent or Firm:

Patent Business Corporation Daiichi International Patent Office

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