Title:
流れ調整システム
Document Type and Number:
Japanese Patent JP4372010
Kind Code:
B2
Abstract:
A flow control system (200) comprises a substantially rigid vessel (210) having first and second ends, the first end of the rigid vessel (210) having an inlet (114) and an outlet (116), a process fluid reservoir situated in the rigid vessel in fluid communication with the inlet and outlet, a drive fluid reservoir situated in the rigid vessel, a diaphragm (320) positioned in the rigid vessel (210) that separates the drive fluid reservoir from the process fluid reservoir, such that movement of the diaphragm (320) in a first direction causes process fluid to be drawn into the inlet (114) and movement of the diaphragm (320) in a second direction causes process fluid to be expelled from the outlet (116); and a pump in fluid communication with the working fluid reservoir to selectively meter working fluid into and out of the working fluid reservoir, such that metering working fluid out of the working fluid reservoir displaces the diaphragm in the first direction to draw process fluid into the inlet and metering working fluid into the working fluid reservoir displaces the diaphragm in the second direction to expel process fluid from the outlet.
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Inventors:
Wahler, Mashiyu G
Application Number:
JP2004541523A
Publication Date:
November 25, 2009
Filing Date:
September 10, 2003
Export Citation:
Assignee:
Emerson Electric Company
International Classes:
F04B15/00; B24B37/04; B24B57/02; G05D7/06; H01L21/304
Domestic Patent References:
JP5508700A | ||||
JP2001317468A | ||||
JP2001090676A | ||||
JP2001150346A | ||||
JP2001300844A | ||||
JP2002043261A | ||||
JP2001326200A | ||||
JP2002013478A |
Attorney, Agent or Firm:
Yoshio Kawaguchi
Makoto Ono
Katsuma Osaki
Mitsuaki Tsubokura
Makoto Ono
Katsuma Osaki
Mitsuaki Tsubokura