Title:
感光性接着剤組成物、並びにこれを用いて得られる接着フィルム、接着シート、接着剤層付半導体ウェハ、半導体装置及び電子部品
Document Type and Number:
Japanese Patent JP4375481
Kind Code:
B2
Abstract:
A photosensitive adhesive composition comprising: (A) a polyimide having a carboxyl group as a side chain, whereof the acid value is 80 to 180 mg/KOH; (B) a photo-polymerizable compound; and (C) a photopolymerization initiator.
Inventors:
Takashi Kawamori
Takashi Masuko
Katogi Shigeki
Masaaki Yasuda
Takashi Masuko
Katogi Shigeki
Masaaki Yasuda
Application Number:
JP2007524032A
Publication Date:
December 02, 2009
Filing Date:
June 30, 2006
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
G03F7/037; G03F7/004
Domestic Patent References:
| JP2005055545A | ||||
| JP4337380A |
Foreign References:
| WO2005019231A1 | ||||
| WO2004111148A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Hideki Okita
Shiro Terasaki
Hideki Okita