Title:
パターン形成体の製造方法
Document Type and Number:
Japanese Patent JP4383095
Kind Code:
B2
Inventors:
Kaori Yamashita
Hironori Kobayashi
Hironori Kobayashi
Application Number:
JP2003165362A
Publication Date:
December 16, 2009
Filing Date:
June 10, 2003
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G03F7/004; G03F7/20; G02B5/20; G03F7/075; H01L21/027
Domestic Patent References:
| JP2000249821A | ||||
| JP2002139615A | ||||
| JP2003103218A | ||||
| JP2003139975A | ||||
| JP2003295428A | ||||
| JP2004294684A | ||||
| JP2004333914A |
Foreign References:
| US20030087073 |
Other References:
光触媒で微細加工 バイオチップなどに応用 東大が新技術,日経産業新聞,2001年11月20日,1面
Attorney, Agent or Firm:
Akihiko Yamashita
Kishimoto Tatsuto
Kishimoto Tatsuto