Title:
処理装置
Document Type and Number:
Japanese Patent JP4388627
Kind Code:
B2
Inventors:
Jun Hirose
Jun Ozawa
Jun Ozawa
Application Number:
JP19074999A
Publication Date:
December 24, 2009
Filing Date:
July 05, 1999
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B01J4/02; H01L21/302; B01J19/00; B01J19/08; H01L21/3065
Domestic Patent References:
| JP10121253A | ||||
| JP61227834A | ||||
| JP10121252A | ||||
| JP9143739A | ||||
| JP5184977A | ||||
| JP2030127A |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara