Title:
シート漏洩検出機を運転する方法および該方法を実施するのに適したシート漏洩検出機
Document Type and Number:
Japanese Patent JP4395262
Kind Code:
B2
Abstract:
A method for operating a film leak detector (1) which includes two films (5, 6) each stretched in a frame (3, 4), which, with a test sample (79) emplaced, delimit a test chamber (80). The detector is equipped with two vacuum pumps (13, 30), in which first the test chamber (80) is evacuated and, after the evacuation operation, a leak detection operation takes place. In order to avoid test gas pollution and impurities during the first phase of the evacuation of the test chamber (80), only one (13) of the two vacuum pumps is operated and during the leak detection operation only the second vacuum pump (30) is operated.
Inventors:
Rudolf Frosbach
Rudy Witt
Rudy Witt
Application Number:
JP2000576251A
Publication Date:
January 06, 2010
Filing Date:
July 02, 1999
Export Citation:
Assignee:
Inficon GmbH
International Classes:
G01M3/20; G01M3/22
Domestic Patent References:
| JP9196797A | ||||
| JP7181099A | ||||
| JP2001508536A | ||||
| JP50109785A | ||||
| JP10213516A | ||||
| JP2122234A | ||||
| JP7032537U | ||||
| JP59152436U |
Foreign References:
| WO1998016809A1 |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel