Title:
光学薄膜成膜方法および光学薄膜
Document Type and Number:
Japanese Patent JP4405615
Kind Code:
B2
Inventors:
Kanazawa Hidehiro
Kenji Ando
Otani Minoru
Yasuyuki Suzuki
Ryuji Maki
Kenji Ando
Otani Minoru
Yasuyuki Suzuki
Ryuji Maki
Application Number:
JP9662699A
Publication Date:
January 27, 2010
Filing Date:
April 02, 1999
Export Citation:
Assignee:
Canon Inc
International Classes:
B32B9/00; C23C14/34; C23C14/06
Domestic Patent References:
| JP8201601A | ||||
| JP6043304A |
Attorney, Agent or Firm:
Akio Miyazaki
Shinichi Iwata
Masaaki Ogata
Nobuyuki Kaneda
Ishibashi Masayuki
Katsuhiro Ito
Shinichi Iwata
Masaaki Ogata
Nobuyuki Kaneda
Ishibashi Masayuki
Katsuhiro Ito