Title:
真空処理装置
Document Type and Number:
Japanese Patent JP4408520
Kind Code:
B2
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Inventors:
Susumu Arai
Gen Masuda
Gen Masuda
Application Number:
JP2000071410A
Publication Date:
February 03, 2010
Filing Date:
March 15, 2000
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F16K51/02; H01L21/205; B01J19/08; C23C16/44; H01L21/677; H01L21/68
Domestic Patent References:
| JP7041947A | ||||
| JP11145084A | ||||
| JP10172978A | ||||
| JP2294018A | ||||
| JP7183354A | ||||
| JP2001185598A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe