Title:
光学撮像系、とくにカタディオプトリック縮小対物レンズ
Document Type and Number:
Japanese Patent JP4431497
Kind Code:
B2
Abstract:
First (16) and second (19) tilted mirrors (TM) tilt at first and second tilting angles respectively against an optical axis. In one of the TM, a ratio (Rsp) between a reflecting level (RL) for s-polarized light and an RL for p-polarized light is greater than one in an incidence angle area including the angle of tilt and the corresponding ratio in the other TM is less than one. An Independent claim is also included for a mirror for ultraviolet light with a mirror substrate and a reflex coating on the mirror substrate.
Inventors:
Christoph Tsazek
Birgit Meking
Jens Ullman
Christian Wagner
Birgit Meking
Jens Ullman
Christian Wagner
Application Number:
JP2004535124A
Publication Date:
March 17, 2010
Filing Date:
August 21, 2003
Export Citation:
Assignee:
Carl Zeiss SMT AG
International Classes:
G02B5/30; H01L21/027; G02B13/14; G02B13/24; G02B17/08; G03F7/20
Domestic Patent References:
| JP10160915A | ||||
| JP2000003852A | ||||
| JP2000147382A | ||||
| JP2001274083A | ||||
| JP9265005A |
Foreign References:
| WO2001023914A1 | ||||
| WO2001065296A1 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi