Title:
半導体試験装置
Document Type and Number:
Japanese Patent JP4448609
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a semiconductor testing device shortening the operation time of a relay turning the connection between a DC measuring unit and a device under test(DUT) on and off at DC measurement. SOLUTION: This semiconductor testing device controls the on/off actions of a force relay of a force line and a sense relay of a sense line in a RON state to turn the connection between the DC measuring unit and the DUT on and off for DC measurement. The semiconductor testing device is provided with a short circuit relay short-circuiting the connection between the force line on the DC measuring unit side from the force relay and the sense line on the DC measuring unit side from the sense relay and a relay control means turning the short circuit relay on in advance at DC measurement, then turning the force relay and the sense relay on, and turning the short circuit relay off for DC measurement after both relays are stabilized.
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Inventors:
Koichi Ebiya
Application Number:
JP2000302847A
Publication Date:
April 14, 2010
Filing Date:
September 29, 2000
Export Citation:
Assignee:
Advantest Corporation
International Classes:
G01R31/26
Domestic Patent References:
| JP3189575A | ||||
| JP391984U |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation