Title:
研磨液組成物
Document Type and Number:
Japanese Patent JP4451347
Kind Code:
B2
Inventors:
Yoshiaki Oshima
Application Number:
JP2005127860A
Publication Date:
April 14, 2010
Filing Date:
April 26, 2005
Export Citation:
Assignee:
Kao Corporation
International Classes:
C09K3/14; B24B37/00; G11B5/84; H01L21/304
Domestic Patent References:
| JP2003124160A | ||||
| JP5043868A | ||||
| JP2003031529A | ||||
| JP2004300347A | ||||
| JP2005186269A | ||||
| JP62235386A | ||||
| JP2000269170A |
Attorney, Agent or Firm:
Yoshinori Hosoda