Title:
磁気記録媒体用基板の洗浄装置および洗浄方法
Document Type and Number:
Japanese Patent JP4451430
Kind Code:
B2
Abstract:
A washing device of a substrate for a magnetic recording medium of the present invention includes an immersion tank; a plurality of screw conveyors that are provided in the immersion tank and that hold the substrates for a magnetic recording medium; and a rotation mechanism that causes synchronous rotation of and supports the plurality of screw conveyors, wherein both ends of main shafts of the screw conveyors are provided outside of the immersion tank, the main shafts of these screw conveyors penetrate the tank walls of the immersion tank in a non-contact manner, and the plurality of substrates for a magnetic recording medium that are held by the plurality of screw conveyors are washed by a wet process using a washing liquid that is contained in the immersion tank.
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Inventors:
Satoshi Ueno
Application Number:
JP2006319794A
Publication Date:
April 14, 2010
Filing Date:
November 28, 2006
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
G11B5/84; B08B3/04; B08B3/12
Domestic Patent References:
| JP2001150336A | ||||
| JP6060371A | ||||
| JP10242103A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama