フッ化カルシウム結晶育成ルツボ及びフッ化カルシウム結晶の製造方法

Title:

フッ化カルシウム結晶育成ルツボ及びフッ化カルシウム結晶の製造方法

Document Type and Number:

Japanese Patent JP4452999

Kind Code:

B2

More Like This:

JPWO2003054590	Fluoride crystal material for optical elements used in optical lithography equipment and its manufacturing method
WO/2001/064975	METHOD AND DEVICE FOR GROWING LARGE-VOLUME ORIENTED MONOCRYSTALS

Inventors:

Keiji Sumitani
Natimus Sengtvan
Hiroyuki Ishibashi
Masahiro Aoshima

Application Number:

JP2004149040A

Publication Date:

April 21, 2010

Filing Date:

May 19, 2004

Export Citation:

Assignee:

Hitachi Chemical Co., Ltd.

International Classes:

C30B29/12; C30B11/00

Domestic Patent References:

JP2004010461A

Previous Patent: 配管継手

Next Patent: 油圧緩衝器