Title:
薄膜トランジスタの製造方法
Document Type and Number:
Japanese Patent JP4458048
Kind Code:
B2
Inventors:
Ishii Hiromitsu
Application Number:
JP2006046072A
Publication Date:
April 28, 2010
Filing Date:
February 23, 2006
Export Citation:
Assignee:
CASIO COMPUTER CO.,LTD.
International Classes:
H01L29/786; H01L21/336
Domestic Patent References:
| JP2005033172A | ||||
| JP2000195794A | ||||
| JP2001264740A | ||||
| JP2003037268A | ||||
| JP4051529A | ||||
| JP62252973A | ||||
| JP10041519A |