Title:
光源ユニットの多層膜ミラーを交換する方法
Document Type and Number:
Japanese Patent JP4458330
Kind Code:
B2
Abstract:
A light source unit including a condensing mirror for collecting EUV light emitted from a light emission point, a debris reducing member for reducing debris, produced from the light emission point or from a portion around the light emission point, and to be deposited on the condensing mirror, and a base member arranged so that the condensing mirror and the debris reducing member are mounted thereon.
More Like This:
Inventors:
Goji Miyaji
Fujimoto Kazuki
Fujimoto Kazuki
Application Number:
JP2003434551A
Publication Date:
April 28, 2010
Filing Date:
December 26, 2003
Export Citation:
Assignee:
Canon Inc
International Classes:
G21K5/00; H01L21/027; G03B27/52; G03F7/20; G21K5/02; G21K5/08; H05H1/24
Domestic Patent References:
| JP2001042098A | ||||
| JP2003008124A | ||||
| JP2001318470A | ||||
| JP2002131605A | ||||
| JP11244690A |
Foreign References:
| WO2001095362A1 |
Attorney, Agent or Firm:
Yuichi Uchio