Title:
検査装置
Document Type and Number:
Japanese Patent JP4460266
Kind Code:
B2
Inventors:
Masayuki Ansai
Kazuhiro Yamauchi
Kazuhiro Yamauchi
Application Number:
JP2003388184A
Publication Date:
May 12, 2010
Filing Date:
November 18, 2003
Export Citation:
Assignee:
Nippon Micronics Co., Ltd.
International Classes:
G01R31/00; G01R31/26
Domestic Patent References:
| JP9179139A | ||||
| JP8114810A | ||||
| JP8229798A | ||||
| JP2002373925A | ||||
| JP8316699A |
Attorney, Agent or Firm:
Nobuyuki Matsunaga