Title:
基材表面から金属酸化物を除去する方法及び装置
Document Type and Number:
Japanese Patent JP4460349
Kind Code:
B2
Abstract:
An apparatus and a method comprising same for removing metal oxides from a substrate surface are disclosed herein. In one particular embodiment, the apparatus comprises an electrode assembly that has a housing that is at least partially comprised of an insulating material and having an internal volume and at least one fluid inlet that is in fluid communication with the internal volume; a conductive base connected to the housing comprising a plurality of conductive tips that extend therefrom into a target area and a plurality of perforations that extend therethrough and are in fluid communication with the internal volume to allow for a passage of a gas mixture comprising a reducing gas.
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Inventors:
Chun Christine Don
Wayne Thomas McDermott
Alexander Schwartz
Gregory Koslov Arslanian
Richard E. Patrick
Gary A. Obeck
Donald A. Sekhum, Junior
Wayne Thomas McDermott
Alexander Schwartz
Gregory Koslov Arslanian
Richard E. Patrick
Gary A. Obeck
Donald A. Sekhum, Junior
Application Number:
JP2004134190A
Publication Date:
May 12, 2010
Filing Date:
April 28, 2004
Export Citation:
Assignee:
AIR PRODUCTS AND CHEMICALS INCORPORATED
International Classes:
C23G5/00; C25F1/02; B23K1/008; B23K1/20; B23K35/26; B23K35/38; H01J37/32; H01L21/304; H01L21/3063; H01L21/3065; H01L21/311; H01L21/60; H01L21/00
Domestic Patent References:
| JP8209353A | ||||
| JP2190489A | ||||
| JP1307225A | ||||
| JP5023579A | ||||
| JP11214320A | ||||
| JP62256840A | ||||
| JP2000311868A | ||||
| JP2000311940A | ||||
| JP2002361028A | ||||
| JP2003001411A | ||||
| JP2002367962A |
Foreign References:
| EP1291111A1 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Masaya Nishiyama
Yoshihiro Kobayashi
Atsushi Ebiya
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Masaya Nishiyama
Yoshihiro Kobayashi
Atsushi Ebiya