Title:
検査装置および検査方法
Document Type and Number:
Japanese Patent JP4461392
Kind Code:
B2
Abstract:
An apparatus for testing a semiconductor device that has opposing first and second sides is provided. The semiconductor device includes at least one functional unit on the first side and a plurality of terminals on the second side. The apparatus may include, but is not limited to, a mounting structure, and a plurality of electrodes. The mounting structure has at least one stage that is configured to allow the semiconductor device to be mounted thereon. The mounting structure has a communicating hole that penetrates the mounting structure from the stage. The communicating hole allows the at least one functional unit to face to the communicating hole while the semiconductor device is mounted on the stage. Each of the plurality of electrodes is configured to be contactable to a corresponding one of the plurality of terminals, while the semiconductor device is mounted on the stage.
Inventors:
Yoshihiro Okura
Application Number:
JP2006258487A
Publication Date:
May 12, 2010
Filing Date:
September 25, 2006
Export Citation:
Assignee:
Yamaha Corporation
International Classes:
G01R31/26; H01R33/76
Domestic Patent References:
| JP2002343522A | ||||
| JP62111673U |
Attorney, Agent or Firm:
Masaki Hattori