Title:
ワイヤソーおよびガイドローラ組立体
Document Type and Number:
Japanese Patent JP4473499
Kind Code:
B2
More Like This:
Inventors:
Toyohiro Hoshiyama
Toshio Yamanaka
Hamasaki Tatsumi
Toshio Yamanaka
Hamasaki Tatsumi
Application Number:
JP2002281056A
Publication Date:
June 02, 2010
Filing Date:
September 26, 2002
Export Citation:
Assignee:
Toyo Advanced Technologies Co., Ltd.
International Classes:
B24B27/06; B28D5/04; H01L21/304
Domestic Patent References:
| JP2000084826A | ||||
| JP2000218507A | ||||
| JP2003145406A |
Attorney, Agent or Firm:
Etsushi Kotani
Kyuichi Ueki
Muramatsu Toshiro
Kyuichi Ueki
Muramatsu Toshiro