Title:
処理システム
Document Type and Number:
Japanese Patent JP4476133
Kind Code:
B2
Inventors:
Takeyama Kuriyama
Jun Satake
Tatsuya Iwasaki
Yutaka Sakata
Mitsuhiro Sakai
Jun Satake
Tatsuya Iwasaki
Yutaka Sakata
Mitsuhiro Sakai
Application Number:
JP2005048922A
Publication Date:
June 09, 2010
Filing Date:
February 24, 2005
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B65G49/06; H01L21/027; H01L21/677
Domestic Patent References:
| JP2004288720A | ||||
| JP10041368A | ||||
| JP10321704A | ||||
| JP11130255A | ||||
| JP2004056016A |
Attorney, Agent or Firm:
Filial piety Sasaki