Title:
形状検査装置および形状検査プログラム
Document Type and Number:
Japanese Patent JP4478808
Kind Code:
B2
Inventors:
Akira Yasukawa
Application Number:
JP2009117422A
Publication Date:
June 09, 2010
Filing Date:
May 14, 2009
Export Citation:
Assignee:
Aval Data Co., Ltd.
International Classes:
G01B11/24; G01N21/956; G06T1/00
Domestic Patent References:
| JP2008078635A | ||||
| JP2007086056A | ||||
| JP2007087210A | ||||
| JP2003215060A |
Foreign References:
| WO2006006525A1 |
Attorney, Agent or Firm:
Fuyuki Nagai