Title:
半導体基板の評価装置及び半導体基板の評価方法
Document Type and Number:
Japanese Patent JP4479318
Kind Code:
B2
Inventors:
Tsuyoshi Otsuki
Hideki Sato
Hideki Sato
Application Number:
JP2004114466A
Publication Date:
June 09, 2010
Filing Date:
April 08, 2004
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
G01R1/06; G01R31/26; H01L21/66
Domestic Patent References:
| JP11260870A | ||||
| JP85459C2 | ||||
| JP7280836A | ||||
| JP2001244309A | ||||
| JP2003031633A |
Attorney, Agent or Firm:
Mikio Yoshimiya