Title:
多層構造の膜の製造方法及び液体イジェクタの製造方法
Document Type and Number:
Japanese Patent JP4485733
Kind Code:
B2
Abstract:
A method for fabricating a membrane (50) having a corrugated, multi-layer structure, comprising the steps of: providing a substrate (20) having an insulator layer (30) on the top surface of the substrate (20), a conductive layer (40) on the insulator layer, a sacrificial layer (206) on said conductive layer (40), and a second conductive layer (202); patterning a series of etch holes (205) in the second conductive layer (202) to allow release etchant to have access to a second sacrificial layer (206) ; depositing the second sacrificial layer (206) onto said second conductive layer (202) so that the series of holes (205) are filled with the second sacrificial layer (206) ; patterning the second sacrificial layer with a radial and/or concentric grid pattern so that a third conductive layer (201) when deposited will form the support structure and top portion of the corrugated structure; depositing the third conductive layer (201) so that the grid pattern is filled in and is in contact with the second conductive layer (202) and; removing the first and second sacrificial layers (206) by immersing the device in a release etchant.
Inventors:
Peter M Galvin
Elliott Aklund
Elliott Aklund
Application Number:
JP2002008242A
Publication Date:
June 23, 2010
Filing Date:
January 17, 2002
Export Citation:
Assignee:
XEROX CORPORATION
International Classes:
B41J2/045; B81C1/00; B41J2/055; B41J2/14; B41J2/16; B81B3/00; F04B43/04; H04R7/08
Domestic Patent References:
| JP10274164A | ||||
| JP5001669A | ||||
| JP10070287A | ||||
| JP2000326299A | ||||
| JP2001510107A |
Attorney, Agent or Firm:
Minoru Nakamura
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Hideto Takeuchi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Hideto Takeuchi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda