Title:
切削装置におけるチャックテーブルの回転軸と顕微鏡の中心との位置合わせ方法
Document Type and Number:
Japanese Patent JP4485771
Kind Code:
B2
Inventors:
Satoshi Sawaki
Application Number:
JP2003324837A
Publication Date:
June 23, 2010
Filing Date:
September 17, 2003
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301
Domestic Patent References:
| JP61120209A | ||||
| JP2000199704A | ||||
| JP3113412U |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara