Title:
HEMT及びその製造方法
Document Type and Number:
Japanese Patent JP4492034
Kind Code:
B2
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Inventors:
Yuji Ohmaki
Mitsuo Hayamura
Tanimoto Shinji
Mitsuo Hayamura
Tanimoto Shinji
Application Number:
JP2003107259A
Publication Date:
June 30, 2010
Filing Date:
April 11, 2003
Export Citation:
Assignee:
Nichia Corporation
International Classes:
H01L21/338; H01L23/34; H01L29/778; H01L29/812
Domestic Patent References:
| JP10070139A | ||||
| JP2000091349A | ||||
| JP9252112A | ||||
| JP3132043A |