減圧乾燥装置及び塗布膜形成方法 - 東京エレクトロン株式会社

Title:

減圧乾燥装置及び塗布膜形成方法

Document Type and Number:

Japanese Patent JP4496229

Kind Code:

B2

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Inventors:

Takahiro Kitano
Shinichi Sugimoto
Naoya Hirakawa
Hama

Application Number:

JP2007001664A

Publication Date:

July 07, 2010

Filing Date:

January 09, 2007

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

H01L21/027; B05C9/14; B05D3/12

Domestic Patent References:

Attorney, Agent or Firm:

Toshio Inoue

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