Title:
ロードロック室
Document Type and Number:
Japanese Patent JP4501305
Kind Code:
B2
Inventors:
Kato Masato
Application Number:
JP2001102415A
Publication Date:
July 14, 2010
Filing Date:
March 30, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/22; H01L21/205; H01L21/324
Domestic Patent References:
| JP10242242A |
Attorney, Agent or Firm:
Akihiro Asai