Title:
マスク、蒸着装置、有機電界発光表示装置
Document Type and Number:
Japanese Patent JP4505473
Kind Code:
B2
Abstract:
A mask (310) and a deposition apparatus using the same are disclosed. One embodiment of the mask (310) is used for depositing a thin film on the substrate having a plurality of sub-pixel regions. The mask includes a first region (31) having a plurality of the first openings (311R,311G,311B), each of which corresponds to one of the plurality of sub-pixel regions. The mask also includes second regions (32) having a plurality of the second openings (312R,312G,312B), each of which corresponds to at least two of the plurality of the sub-pixel regions. The second regions (32) are positioned on both sides of the first region (31).
Inventors:
Money
Application Number:
JP2007012528A
Publication Date:
July 21, 2010
Filing Date:
January 23, 2007
Export Citation:
Assignee:
Samsung Mobile Display Co., Ltd.
International Classes:
C23C14/04; C23C14/24; H01L51/50; H05B33/10
Domestic Patent References:
| JP2002299051A | ||||
| JP2001284048A | ||||
| JP2003163079A | ||||
| JP2005519187A | ||||
| JP2004185832A |
Attorney, Agent or Firm:
IPD International Patent Business Corporation
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara