Title:
半導体装置及び半導体装置の生産システム
Document Type and Number:
Japanese Patent JP4526764
Kind Code:
B2
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Inventors:
Atsushi Isobe
Shunpei Yamazaki
Koji Dairiki
Hiroshi Shibata
Chiho Kokubo
Tatsuya Arao
Masahiko Hayakawa
Hidekazu Miyairi
Akihisa Shimomura
Koichiro Tanaka
Mai Akiba
Shunpei Yamazaki
Koji Dairiki
Hiroshi Shibata
Chiho Kokubo
Tatsuya Arao
Masahiko Hayakawa
Hidekazu Miyairi
Akihisa Shimomura
Koichiro Tanaka
Mai Akiba
Application Number:
JP2003005633A
Publication Date:
August 18, 2010
Filing Date:
January 14, 2003
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
G02F1/1368; H01L21/336; H01L21/20; H01L21/268; H01L29/786
Domestic Patent References:
| JP8288515A | ||||
| JP2001035790A | ||||
| JP2001319877A | ||||
| JP2000277450A | ||||
| JP7249779A |