Title:
超音波洗浄装置
Document Type and Number:
Japanese Patent JP4532580
Kind Code:
B2
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Inventors:
Kazushige Suzuki
Ban Takeshi
Ban Takeshi
Application Number:
JP2008211977A
Publication Date:
August 25, 2010
Filing Date:
August 20, 2008
Export Citation:
Assignee:
Kaijo Co., Ltd.
International Classes:
B08B3/12; H01L21/304
Domestic Patent References:
| JP2007502032A | ||||
| JP2007289807A |
Attorney, Agent or Firm:
Mutsumi Yanase
Atsushi Watanabe
Atsushi Watanabe