Title:
クリーンルーム及び半導体デバイスもしくは液晶ディスプレーの製造方法
Document Type and Number:
Japanese Patent JP4535477
Kind Code:
B2
Inventors:
Sadao Kobayashi
Megumi Wakayama
Hachiro Yamamoto
Megumi Wakayama
Hachiro Yamamoto
Application Number:
JP2000283711A
Publication Date:
September 01, 2010
Filing Date:
September 19, 2000
Export Citation:
Assignee:
Taisei Corporation
International Classes:
B65G49/00; F24F7/06; H01L21/677; H01L21/68
Domestic Patent References:
| JP5833930U | ||||
| JP56162335A | ||||
| JP56162336A |
Attorney, Agent or Firm:
Yoshikazu Mitsuhashi