Title:
光源装置及びそれを用いた露光装置
Document Type and Number:
Japanese Patent JP4535732
Kind Code:
B2
Abstract:
A light source device capable of extending the life of a collector mirror and reducing running cost by protecting the collector mirror from debris that is considered harmful to a mirror coating while securing the collection solid angle and collection rate of EUV light. The light source device includes a target supply unit for supplying a material to become the target; a laser unit for generating plasma by applying a laser beam to the target; a collection optical system for collecting the extreme ultra violet light radiating from the plasma and emitting the extreme ultra violet light; and magnetic field generating unit for generating a magnetic field within the collection optical system when supplied with current so as to trap charged particles radiating from the plasma.
Inventors:
Hoshino Hideyuki
Hiroshi Komori
Akira Endo
Hiroshi Komori
Akira Endo
Application Number:
JP2004002142A
Publication Date:
September 01, 2010
Filing Date:
January 07, 2004
Export Citation:
Assignee:
KOMATSU LTD.
Gigaphoton Co., Ltd.
Gigaphoton Co., Ltd.
International Classes:
G21K5/00; G03F7/20; H01L21/027; G21K5/02; G21K5/08; H05G2/00; H05H1/24
Domestic Patent References:
| JP2007522646A | ||||
| JP2552433B2 | ||||
| JP2003092199A | ||||
| JP4056774A | ||||
| JP2023612A | ||||
| JP63096267A | ||||
| JP2004207736A |
Foreign References:
| WO2005064401A1 |
Attorney, Agent or Firm:
Masaaki Utsunomiya
Atsushi Watanabe
Mutsumi Yanase
Atsushi Watanabe
Mutsumi Yanase