樹脂フィルムの乾式エッチング方法及びその装置

Title:

樹脂フィルムの乾式エッチング方法及びその装置

Document Type and Number:

Japanese Patent JP4536309

Kind Code:

B2

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Inventors:

Ryoaki Hamanaka
Kamasa Nakano
Tatsuya Takeuchi
Shinsuke Fukumoto

Application Number:

JP2001538157A

Publication Date:

September 01, 2010

Filing Date:

November 13, 2000

Export Citation:

Assignee:

Toray Engineering Co., Ltd.
Shinko Seiki Co., Ltd.

International Classes:

B29C59/14; H05K3/00; H01L21/311

Domestic Patent References:

Attorney, Agent or Firm:

Shinichi Ogawa
Takashi Noguchi
Kazuhiko Saishita

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