Title:
基板搬出入装置及び基板搬出入方法
Document Type and Number:
Japanese Patent JP4537411
Kind Code:
B2
Abstract:
A substrate loading/unloading device for unloading a substrate from a tray and loading a substrate onto a tray. A palette is positioned at a predetermined position on a conveyor, and in this state with the palette positioned, a palette lifting means holds trays, from among stacks of trays on the palette, which are a tray to be loaded/unloaded and a tray not to be processed that is placed on the stage above the tray to be loaded/unloaded, and the palette lifting means moves the held trays vertically. A substrate separation pin is installed on the tray lifting means, and the pin is caused to enter into a space below the tray to be loaded/unloaded, thereby a substrate is separated from the tray to be loaded/unloaded. With the substrate separation pin positioned in the space below the tray to be loaded/unloaded, the pin is inserted into an insertion hole in the tray to be loaded/unloaded. Then, the substrate is lifted by the substrate separation pin, and thus the substrate can be taken out.
Inventors:
Tetsuro Kamikachi
Tomohiro Ueda
Tomohiro Ueda
Application Number:
JP2006548435A
Publication Date:
September 01, 2010
Filing Date:
April 25, 2006
Export Citation:
Assignee:
Hirata Kiko Co., Ltd.
International Classes:
B65G49/06; H01L21/673; H01L21/677
Domestic Patent References:
| JP2005104475A | 2005-04-21 | |||
| JP2004186249A | 2004-07-02 | |||
| JPH06271009A | 1994-09-27 | |||
| JPH01281220A | 1989-11-13 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura