Title:
位置検出装置、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP4541481
Kind Code:
B2
Inventors:
Kazuhiko Mishima
Application Number:
JP2000044497A
Publication Date:
September 08, 2010
Filing Date:
February 22, 2000
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; G02B7/28; G03F7/20; G03F9/00
Domestic Patent References:
| JP11340132A | ||||
| JP11260679A | ||||
| JP11304422A | ||||
| JP9320926A |
Attorney, Agent or Firm:
Yuichi Uchio