Title:
ガス駆動衛星回転装置及び炭化ケイ素層を形成する方法
Document Type and Number:
Japanese Patent JP4546095
Kind Code:
B2
Abstract:
A gas driven rotation apparatus for use with a flow of drive gas comprising a base member (150), a main platter (130) overlying an upper surface of the base member, at least one generally radially extending substantially straight satellite drive channel (192a, 192b, 192c) formed in the upper surface of the main platter and one or more satellite platters (180) overlying the main platter and the satellite drive channel. The apparatus is adapted to direct at least a portion of the flow of drive gas through the satellite drive channel to rotate the satellite platter (180) relative to the main platter (130) about an axis of rotation.
Inventors:
Michael james paisley
Joseph John Squirker Squirrel
Joseph John Squirker Squirrel
Application Number:
JP2003585160A
Publication Date:
September 15, 2010
Filing Date:
February 04, 2003
Export Citation:
Assignee:
CREE INC.
International Classes:
C23C16/455; H01L21/02; C23C14/50; C23C16/458; C30B25/12; H01L21/00; H01L21/205; H01L21/683
Domestic Patent References:
| JP2001524749A |
Attorney, Agent or Firm:
Yoshikazu Tani
Kazuo Abe
Kazuo Abe