Title:
検査基準設定装置及び方法、並びに、工程検査装置
Document Type and Number:
Japanese Patent JP4552749
Kind Code:
B2
Abstract:
An information processing device stores an extracted feature of each inspection item of the process inspection, and a determination result of a final inspection in a memory device, calculates a separation degree between a distribution of features of products which were determined as good products at the final inspection and a distribution of features of products which were determined as defective products at the final inspection for every inspection item or every combination of inspection items based on data of the products stored in the memory device, selects an inspection item whose inspection standard is to be reset from the inspection items or the combinations of the inspection items based on a value of the separation degree. Thus providing a method of appropriately setting an inspection standard for detecting a defect sign during process inspection. Further a process inspection device and inspection standard setting device which implements the same.
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Inventors:
Takisaki Hiroshi
Kojiya Kojiya
Kojiya Kojiya
Application Number:
JP2005139903A
Publication Date:
September 29, 2010
Filing Date:
May 12, 2005
Export Citation:
Assignee:
OMRON Corporation
International Classes:
G01N21/956; G01B21/00; G05B19/418; H05K3/00; H05K3/34
Domestic Patent References:
| JP2004226175A | ||||
| JP2002031606A | ||||
| JP6112295A | ||||
| JP2003108978A | ||||
| JP200271575A |
Attorney, Agent or Firm:
Kazunobu Sera
Mayuko Wakuda
Mayuko Wakuda