To provide a vibration-proof structure for an ultrasonic sensor capable of sharply reducing or preventing propagation of vibration from an enclosure being an impediment factor of measurement of the ultrasonic sensor, and a facility instrument having an ultrasonic sensor equipped with the vibration-proof structure.
A piezoelectric element 61 such as a PZT for constituting the ultrasonic sensor 6, is fixed on a base 62. In this state, an internal structure 20 being a built-in enclosure contained in a show case is sandwiched with vibration damping materials 21a, the internal structure 20 sandwiched with these damping materials 21a is pierced with a fixing screw 22, and the tip of the fixing screw is screwed into the base 62, to stick the ultrasonic sensor 6 to the internal structure 20 via the damping materials 21a. As the damping materials 21a, materials having a natural frequency different from that of the piezoelectric element 61 are chosen, and moreover anisotropically processed damping materials 21a are chosen.
COPYRIGHT: (C)2008,JPO&INPIT
Masayuki Watakuchi
Nippon Kenkyu Corporation
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